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Title Structure and substructure properties of magnesium oxide thin films
Authors Diachenko, Oleksii Viktorovych  
Opanasiuk, Anatolii Serhiiovych  
Kurbatov, Denys Ihorovych  
Панчал, Ч.
Panchal, Ch.
Keywords MgO
спрей піроліз
спрей пиролиз
spray pyrolysis
рентгеноструктурний аналіз
рентгеноструктурный анализ
x-ray diffraction analysis
мікронапруга
микронапряжение
microstrain
Type Article
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/43177
Publisher Proceedings of International Symposium on Semiconductor Materials and Devices
License
Citation Structure and substructure properties of magnesium oxide thin films [Текст] / O.V. Diachenko, A.S. Opanasuyk, D.I. Kurbatov, Ch. Panchal // Proceedings of International Symposium on Semiconductor Materials and Devices. - 2015. - P.2-5.
Abstract In this paper we have conducted a comprehensive study of the structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. Thin films MgO were prepared by spray pyrolysis technique from a magnesium chloride solution. Identified the phase composition, the lattice constant, crystallite size and coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of homogeneous single-phase films of stoichiometric composition were identified.
Appears in Collections: Наукові видання (ЕлІТ)

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