Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/43177
Title: Structure and substructure properties of magnesium oxide thin films
Authors: Diachenko, Oleksii Viktorovych 
Opanasiuk, Anatolii Serhiiovych 
Kurbatov, Denys Ihorovych 
Панчал, Ч.
Panchal, Ch.
Keywords: MgO
спрей піроліз
спрей пиролиз
spray pyrolysis
рентгеноструктурний аналіз
рентгеноструктурный анализ
x-ray diffraction analysis
мікронапруга
микронапряжение
microstrain
Issue Year: 2015
Publisher: Proceedings of International Symposium on Semiconductor Materials and Devices
Citation: Structure and substructure properties of magnesium oxide thin films [Текст] / O.V. Diachenko, A.S. Opanasuyk, D.I. Kurbatov, Ch. Panchal // Proceedings of International Symposium on Semiconductor Materials and Devices. - 2015. - P.2-5.
Abstract: In this paper we have conducted a comprehensive study of the structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. Thin films MgO were prepared by spray pyrolysis technique from a magnesium chloride solution. Identified the phase composition, the lattice constant, crystallite size and coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of homogeneous single-phase films of stoichiometric composition were identified.
URI: http://essuir.sumdu.edu.ua/handle/123456789/43177
Type: Article
Appears in Collections:Наукові видання (ЕлІТ)

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