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Title Influence of thermal annealing and deposition conditions on structure and physical-mechanical properties of multilayered nanosized TiN/ZrN coatings
Authors Pohrebniak, Oleksandr Dmytrovych  
Bondar, Oleksandr Viacheslavovych  
Erdybaeva, N.K.
Plotnikov, S.V.
Turbin, P.V.
Grankin, S.S.
Stolbovoy, V.A.
Sobol, O.V.
Kolesnikov, D.A.
Kozak, C.
Keywords вакуумно-дугове осадження
вакуумно-дуговое осаждение
vacuum-arc deposition
багатошарові TiN/ZrN покриття
многослойные TiN/ZrN покрытия
multilayered TiN/ZrN coatings
структура поверхневих шарів
структура поверхностных слоев
structure of surface layers
механічні властивості
механические свойства
mechanical properties
Type Article
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/46287
Publisher Society of Polish Electrical and Electronics Engineers
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Citation Influence of thermal annealing and deposition conditions on structure and physical-mechanical properties of multilayered nanosized TiN/ZrN coatings [Текст] / A.D. Pogrevbjak, O.V. Bondar, N.K. Erdybaeva [et al.] // Przeglad Elektrotechniczny. — 2015. — №1(12). — С. 228-232.
Abstract Nanostructured multilayered TiN/ZrN coatings were fabricated using vacuum-arc deposition method. Amount of layers was 134-533; average bilayer thickness was 20-125 nm depending on deposition conditions. Good planarity of nanoscale bilayers were observed. Regularities of phase-structure changes in surface layers under the influence of aggressive oxygen atmosphere and high temperature (700С) annealing were established as a model of critical working conditions. Bilayer thickness influence on hardness was explored. Maximum hardness was 42 GPa.
Appears in Collections: Наукові видання (ЕлІТ)

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