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Title Investigation of nanoscale TiN/MoN multilayered systems, fabricated using Arc evaporation
Authors Pohrebniak, Oleksandr Dmytrovych  
Bondar, Oleksandr Viacheslavovych  
Abadias, G.
Eyidi, D.
Beresnev, V.M.
Sobol, O.V.
Postolnyi, B.O.
Zukowski, P.
Keywords vacuum-arc evaporation
multilayered TiN/MoN structures
hardness
Type Article
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/46474
Publisher Polish Academy of Science, Institute of Physics
License
Citation Investigation of nanoscale TiN/MoN multilayered systems, fabricated using Arc evaporation [Текст] / A.D. Pogrebnjak, O.V. Bondar, G. Abadias [та ін.] // Acta Physica Polonica A. — 2015. — №128. — С. 836-840.
Abstract Using the vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN structures with different bilayer periods λ ranging from 8 to 100 nm. We found that molybdenum nitride and titanium nitride layers grown on steel show local partial epitaxy and columnar growth across interfaces. A molybdenum-titanium carbide interlayer was evidenced between the substrate and the multilayer. Molybdenum nitride and titanium nitride layers contain small (5÷30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-M2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 31÷41.8 GPa for the multilayered structure with a 8 nm period. Hardness of the obtained coatings is 25÷45% higher in comparison with the initial single-layer nitride coatings, plasticity index of multilayered structure is 0.075.
Appears in Collections: Наукові видання (ЕлІТ)

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