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Title Recrystallization and Formation of Spheroidal Gold Particles in Amorphous-Like AlN–TiB2–TiSi2 Coatings after Annealing and Subsequent Implantation
Authors Pohrebniak, Oleksandr Dmytrovych  
Dem’yanenko, A.A.
Beresnev, V.M.
Sobol, O.V.
Ivasishin, O.M.
Oyoshi, K.
Takeda, Y.
Amekura, H.
Kupchishin, A.I.
ORCID http://orcid.org/0000-0002-9218-6492
Keywords amorphous AlN–TiB2–TiSi2 coating
ion implantation
high-temperature annealing
Type Article
Date of Issue 2016
URI http://essuir.sumdu.edu.ua/handle/123456789/46989
Publisher Pleiades Publishing, Ltd
License
Citation Recrystallization and Formation of Spheroidal Gold Particles in Amorphous-Like AlN–TiB2–TiSi2 Coatings after Annealing and Subsequent Implantation [Текст] / A.D. Pogrebnjak, A.A. Dem’yanenko, V.M. Beresnev [та ін.] // Physics of the Solid State. — 2016. — №58(7). — С. 1453-1457.
Abstract The recrystallization of the structure of an X-ray amorphous AlN–TiB2–TiSi2 coating containing short-range order regions with characteristic sizes of 0.8–1.0 nm has been performed using a negative gold ion (Au–) beam and high-temperature annealing. Direct measurements using methods of high-resolution transmission electron microscopy (HRTEM) and energy-dispersive X-ray spectral (EDXS) microanalysis have demonstrated that thermal annealing at a temperature of 1300°C in air results in the formation of nanoscale (10–15 nm) phases AlN, AlB2, Al3O3, and TiO2, whereas the ion implantation of negative ions Au– leads to a fragmentation (decrease in the size) of nanograins to 2–5 nm with the formation of spheroidal gold nanocrystallites a few nanometers in size, as well as to the formation of an amorphous oxide film in the depth (near-surface layer) of the coating due to ballistic ion mixing and collision cascades.
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