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Title Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering
Authors Asvarov, A.Sh.
Makhmudov, S.Sh.
Abduev, A.Kh.
Akhmedov, A.K.
Aliev, M.A.
Bilalov, B.A.
Keywords ZnO
Mg thin film
Magnetron sputtering
Structural parameters
Transmittance
Band gap
Type Article
Date of Issue 2016
URI http://essuir.sumdu.edu.ua/handle/123456789/49840
Publisher Sumy State University
License
Citation A.Sh. Asvarov, S.Sh. Makhmudov, A.Kh. Abduev, et al., J. Nano- Electron. Phys. 8 No 4(2), 04053 (2016)
Abstract This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural and optical properties of the ZnO:Mg thin films were investigated. The experiment results showed that the ZnO and ZnO:Mg thin films are polycrystalline with a hexagonal wurtzite structure exhibiting a preferred (002) crystal plane orientation. The results indicated that the crystallinity of ZnO:Mg thin films was significantly affected by both Mg-doping and the woking gas composition. Optical studies revealed that the optical band gap increases with Mg concentration.
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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