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Title | New Computer System for Recognizing Micro- and Nano-Sized Objects in Semiconductors and Colloidal Solutions |
Authors |
Diachenko, L.
Minov, E. Ostapov, S. Fochuk, P. Khalavka, Yu. Bolotnikov, A. James, R.B. |
ORCID | |
Keywords |
Optical defect recognition Nano-tracking analysis Computer vision Growth defects Software developing |
Type | Article |
Date of Issue | 2016 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/49901 |
Publisher | Sumy State University |
License | |
Citation | L. Diachenko, E. Minov, S. Ostapov, et al., J. Nano- Electron. Phys. 8 No 4(2), 04060 (2016) |
Abstract |
In this paper it is describe a new approach developed for recognizing micro- and nano-sized objects and a method for quantitative analysis of these objects. For this purpose was developed the automated systems that can simplify and accelerate the process of nanoparticle tracks analysis under the microscope whereby engineers and scientists are able to recognize the structures of defects in semiconductor wafers, along with nanoparticles and other microscopic objects. This capability is important to both select appropriate crystals and also to apply the data to improve the production process. |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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File | Size | Format | Downloads |
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Diachenko.pdf | 1,01 MB | Adobe PDF | 59248306 |
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