Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/66052
Or use following links to share this resource in social networks: Recommend this item
Title Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings
Authors Sudzhanskaya, I.V.
Poplavsky, А.I.
Goncharov, I.Y.
Glukhov, O.V.
ORCID
Keywords Carbon films
Electrical capacity
Conductivity
Morphology surface
Type Article
Date of Issue 2017
URI http://essuir.sumdu.edu.ua/handle/123456789/66052
Publisher Sumy State University
License
Citation Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings [Текст] / I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov // Журнал нано- та електронної фізики. – 2017. – Т.9, № 6. – 06027. – DOI: 10.21272/jnep.9(6).06027.
Abstract Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

Views

France France
1
Germany Germany
1
Ireland Ireland
2854
Japan Japan
1
Lithuania Lithuania
1
Ukraine Ukraine
15409
United Kingdom United Kingdom
7800
United States United States
88000
Unknown Country Unknown Country
129857
Vietnam Vietnam
381

Downloads

China China
46136
Germany Germany
1
India India
1
Ireland Ireland
1
Japan Japan
1
Lithuania Lithuania
1
South Africa South Africa
1
Ukraine Ukraine
46136
United Kingdom United Kingdom
1
United States United States
87998
Unknown Country Unknown Country
3
Vietnam Vietnam
1

Files

File Size Format Downloads
JNEP_06027_3.pdf 406.78 kB Adobe PDF 180281

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.