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Title Formation of the Microcrystalline Structure in LiNbO3 Thin Films by Pulsed Light Annealing
Authors Zhukov, R.N.
Ilina, T.S.
Skryleva, E.A.
Senatulin, B.R.
Kubasov, I.V.
Kiselev, D.A.
Suchaneck, G.
Malinkovich, M.D.
Parkhomenko, Yu.N.
Savchenko, A.G.
Keywords Li/Nb ratio
rf-magnetron sputtering
post-growth infrared rapid annealing
piezoresponse force microscopy
X-ray photoelectron spectroscopy
Type Article
Date of Issue 2018
URI http://essuir.sumdu.edu.ua/handle/123456789/68698
Publisher Sumy State University
License
Citation Formation of the Microcrystalline Structure in LiNbO[3] Thin Films by Pulsed Light Annealing [Текст] / R.N. Zhukov, T.S. Ilina, E.A. Skryleva [et al.] // Журнал нано- та електронної фізики. - 2018. - Т. 10, № 2. - 02009. - DOI: 10.21272/jnep.10(2).02009.
Abstract LiNbO3 thin films with a thickness of 200 nm were deposited onto Al2O3 substrate by RF-magnetron sputtering technique without intentional substrate heating. The results demonstrate that post-growth infrared pulsed light annealing of the amorphous LiNbO3 films leads to the formation of two phases, LiNbO3 and LiNb3O8. After annealing at temperatures of 700 to 800 °C, the percentage of the nonferroelectric phase LiNb3O8 was minimal. The surface composition of the films annealed at different temperatures was examined by X-ray photoelectron spectroscopy. Piezoresponse force microscopy was used to study both the vertical and the lateral polarization and to visualize the piezoelectric inactivity of LiNb3O8 grains. A comparison of the results of PFM and XPS measurements revealed that there is a correlation between the fraction of the piezoelectric phase and the film composition: At an annealing temperature higher than 850 °C, the atomic ratio of lithium to niobium decreases compared to the initial value along with a decrease of the fraction of the piezoelectric phase.
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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