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Title Особенности решения обратной задачи в спектроэллипсометрических исследованиях
Authors Karpusha, Vasyl Danylovych
Shvets, Uliana Stanislavivna
Keywords решение обратной задачи
метод спектральной єллипсометрии
роз`язання оберненої задачі
метод спектральної еліпсометрії
Type Article
Date of Issue 2004
URI http://essuir.sumdu.edu.ua/handle/123456789/997
Publisher Издательство СумГУ
License
Citation Карпуша, В.Д. Особенности решения обратной задачи в спектроэллипсометрических исследованиях [Текст] / В.Д. Карпуша, У.С. Швец // Вісник Сумського державного університету. Серія Фізика, математика, механіка. - 2004. - №10(69). - С. 28-35.
Abstract In the present paper the possibility of application of spectral ellipsometry method for determination of parameters of near-surface layers amorphous metallic alloys is analysed. The selection criterion of incorrect solutions of inverse ellipsometry task is suggested which is based on the evaluation of the maximal caused by an error of the method deviation determined parameters. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/997
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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