Browsing by Author Tomila, V.


Showing results 1 to 1 of 1
Issue Year Title Author(s) Type Views Downloads
2014 Effect of Substrate Temperature on the Properties of PECVD SiCN Films Porada, O.K.; Kozak, A.O.; Ivashchenko, V.I; Ivashchenkо, L.A.; Tomila, V. Article 1116518 120513