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Title Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”
Authors Odinokov, V.V.
Pavlov, G.Ya.
Panin, V.V.
Raschinsky, V.P.
Shpakov, A.N.
Shubnikov, A.V.
Keywords Vacuum system
Magnetron sputtering
Thin film deposition
Multilayer metallic coatings
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/36126
Publisher Sumy State University
License
Citation V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014)
Abstract A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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