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Title | Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M” |
Authors |
Odinokov, V.V.
Pavlov, G.Ya. Panin, V.V. Raschinsky, V.P. Shpakov, A.N. Shubnikov, A.V. |
ORCID | |
Keywords |
Vacuum system Magnetron sputtering Thin film deposition Multilayer metallic coatings |
Type | Article |
Date of Issue | 2014 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/36126 |
Publisher | Sumy State University |
License | |
Citation | V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014) |
Abstract |
A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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Small-scale Vacuum System for Deposition of Multilayer Metallic Films.pdf | 314,79 kB | Adobe PDF | 1753560359 |
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