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Title | Laser-induced Formation of Conductive Structures on Diamond-like Carbon Films |
Authors |
Chumakov, A.N.
Nikonchuk, I.S. Poklonski, N.A. Gorbachuk, N.I. Obukhov, V.E. |
ORCID | |
Keywords |
Diamond-like carbon films Laser modification Surface resistance Nanocrystalline graphite |
Type | Article |
Date of Issue | 2014 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/37119 |
Publisher | Sumy State University |
License | |
Citation | Proc. NAP 3, 01PCSI09 (2014) |
Abstract |
Modification of diamond-like carbon (DLC) films by laser radiation with a wavelength of 532 nm and pulse duration of 18 ns was investigated. The treatment of DLC films with laser fluence over 0.4 J/cm2 was accompanied by the formation of conductive structures with a surface resistance from a few to hundreds kΩ/sq. Dependence of films conductivity from the laser fluence was established. Relationship between energy density of laser radiation and the structural changes in the films, its heating and evaporation is discussed. |
Appears in Collections: |
Наукові видання (ЕлІТ) |
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File | Size | Format | Downloads |
---|---|---|---|
Nikonchuk_Chumakov_Poklonski_Gorbachuk_Obukhov.pdf | 422,44 kB | Adobe PDF | 12573069 |
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