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Title Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films
Authors Ivashchenko, V.I
Skrynskyy, P.L.
Kozak, A.O
Pohrebniak, Oleksandr Dmytrovych  
Timofeyeva, I.I.
Dub, S.N.
Keywords Nb-Al-N films
AlN films
Magnetron sputtering
Film structure
Mechanical properties
Nanoindentation
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/37182
Publisher Sumy State University
License
Citation Proc. NAP 3, 01NTF17 (2014)
Abstract Nb-Al-N films were deposited by magnetron sputtering of the Nb and Al targets in the Ar-N2 atmosphere on silicon wafers at various currents supplied to the magnetron device with the Al target (IAl=100, 150, 200, 300 mA). The films were studied with XRD, FTIR spectroscopy, as well by nanoindentation and Knoop indentation tests. The films were found to have the nanocomposite nc-B1-NbNx/a-AlN structure and exhibit the nanohardness and Knoop hardness in the ranges of 29-33.5 GPa and 46-48 GPa, respectively. The hardness and elastic modulus has an extreme dependence on IAl.
Appears in Collections: Наукові видання (ЕлІТ)

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