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Title | Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films |
Authors |
Ivashchenko, V.I
Skrynskyy, P.L. Kozak, A.O Pohrebniak, Oleksandr Dmytrovych ![]() Timofeyeva, I.I. Dub, S.N. |
Keywords |
Nb-Al-N films AlN films Magnetron sputtering Film structure Mechanical properties Nanoindentation |
Type | Article |
Date of Issue | 2014 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/37182 |
Publisher | Sumy State University |
License | |
Citation | Proc. NAP 3, 01NTF17 (2014) |
Abstract |
Nb-Al-N films were deposited by magnetron sputtering of the Nb and Al targets in the Ar-N2 atmosphere on silicon wafers at various currents supplied to the magnetron device with the Al target (IAl=100, 150, 200, 300 mA). The films were studied with XRD, FTIR spectroscopy, as well by nanoindentation and Knoop indentation tests. The films were found to have the nanocomposite nc-B1-NbNx/a-AlN structure and exhibit the nanohardness and Knoop hardness in the ranges of 29-33.5 GPa and 46-48 GPa, respectively. The hardness and elastic modulus has an extreme dependence on IAl. |
Appears in Collections: |
Наукові видання (ЕлІТ) |
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File | Size | Format | Downloads |
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Ivashchenko_Skrynskyy_Kozak_Pogrebnjak_Timofeyeva_Dub.pdf | 507,97 kB | Adobe PDF | 2404147 |
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