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Title The Electronic Properties of Film Materials Based on Fe and Pt or Ge
Authors Vlasenko, Oleksandr Volodymyrovych  
Poduremne, Dmytro Vasylovych
Odnodvorets, Larysa Valentynivna
Keywords тонкие пленки
тонкі плівки
thin film
интегральные схемы
інтегральні схеми
integrated circuits
термическое испарение
термічне випаровування
thermal evaporation
Type Conference Papers
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/40986
Publisher Sumy state university
License
Citation Vlasenko, О.V. The Electronic Properties of Film Materials Based on Fe and Pt or Ge [Текст] / О.V. Vlasenko, D.V. Poduremne, L.V. Odnodvorets ; supervisor I.Yu. Protsenko // Фізика, електроніка, електротехніка: матеріали та програма науково-технічної конференції, м. Суми, 20-25 квітня 2015 р. / Відп. за вип. С.І. Проценко. — Суми: СумДУ, 2015. — С. 141-142.
Abstract On the basis of thin films in microelectronics made the following elements of integrated circuits (IC): film resistors; electrodes (electrode film capacitors, spiral inductors busducts, installation guides, closures MIS  transistors) contact paths and platforms; auxiliary elements. Electrical connection of metals and semiconductors with metallic conductors is performed using layered condensation and formation of ohmic contacts not rectifier, the quality of which is largely dependent parameters and characteristics of microelectronic devices, their reliability and durability
Appears in Collections: Наукові видання (ЕлІТ)

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