Showing results 1 to 2 of 2
| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2013 | Mechanism of Oxygen Redistribution During Ultra-shallow Junction Formation in Silicon | Oberemok, O.S.; Gamov, D.V.; Litovchenko, V.G.; Romanyuk, B.M.; Melnik, V.P.; Klad’ko, V.P.; Popov, V.G.; Gudymenko, O.Yo. | Conference Papers | 10744303 | 18131446 |
| 2012 | Oxygen Behavior Around Heavily Doped Ultra-Shallow Junction in Si | Oberemok, O.S.; Gudymenko, O.Yo.; Lytovchenko, V.G.; Melnyuk, V.P. | Conference Papers | 63487643 | 48767377 |