Showing results 1 to 3 of 3
| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2013 | Effect of Added Nitrogen on Properties of SiCN Films Prepared by PECVD Using Hexamethyldisilazane | Porada, O.K.; Kozak, A.O.; Ivashchenko, L.A.; Ivashchenko, V.I.; Tomila, T.V. | Conference Papers | -474491707 | -1806568220 |
| 2014 | Effect of Substrate Temperature on the Properties of PECVD SiCN Films | Porada, O.K.; Kozak, A.O.; Ivashchenko, V.I; Ivashchenkо, L.A.; Tomila, V. | Article | -1549663412 | -899217481 |
| 2015 | Hard Si-C-N Chemical Vapor Deposited Films | Porada, O.K.; Kozak, A.O.; Ivashchenko, V.I.; Dub, S.M.; Pohrebniak, Oleksandr Dmytrovych | Conference Papers | -388455755 | -381529846 |